JPH0446864B2 - - Google Patents

Info

Publication number
JPH0446864B2
JPH0446864B2 JP61052456A JP5245686A JPH0446864B2 JP H0446864 B2 JPH0446864 B2 JP H0446864B2 JP 61052456 A JP61052456 A JP 61052456A JP 5245686 A JP5245686 A JP 5245686A JP H0446864 B2 JPH0446864 B2 JP H0446864B2
Authority
JP
Japan
Prior art keywords
plate
holding
fluid
gap
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61052456A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62211236A (ja
Inventor
Hiromitsu Tokisue
Nobuo Tsumaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5245686A priority Critical patent/JPS62211236A/ja
Publication of JPS62211236A publication Critical patent/JPS62211236A/ja
Publication of JPH0446864B2 publication Critical patent/JPH0446864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP5245686A 1986-03-12 1986-03-12 板状体の保持装置 Granted JPS62211236A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5245686A JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5245686A JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Publications (2)

Publication Number Publication Date
JPS62211236A JPS62211236A (ja) 1987-09-17
JPH0446864B2 true JPH0446864B2 (en]) 1992-07-31

Family

ID=12915219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5245686A Granted JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Country Status (1)

Country Link
JP (1) JPS62211236A (en])

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241841A (ja) * 1988-08-01 1990-02-13 Hitachi Ltd 非平面形状を有する物体の保持装置
JP2865690B2 (ja) * 1989-02-17 1999-03-08 株式会社日立製作所 嵌合挿入装置
US4969676A (en) * 1989-06-23 1990-11-13 At&T Bell Laboratories Air pressure pick-up tool
US5169196A (en) * 1991-06-17 1992-12-08 Safabakhsh Ali R Non-contact pick-up head
EP0902966A1 (en) * 1996-05-31 1999-03-24 IPEC Precision, Inc. Non-contact holder for wafer-like articles
JP4243766B2 (ja) 2006-10-02 2009-03-25 Ｓｍｃ株式会社 非接触搬送装置
JP5752119B2 (ja) * 2009-07-22 2015-07-22 ツィンマーマン ウント シルプ ハンドハーブングステヒニーク ゲゼルシャフト ミット ベシュレンクテル ハフツングＺｉｍｍｅｒｍａｎｎ ＆ Ｓｃｈｉｌｐ Ｈａｎｄｈａｂｕｎｇｓｔｅｃｈｎｉｋ ＧｍｂＨ 真空グリッパー
JP5403247B2 (ja) * 2009-09-07 2014-01-29 村田機械株式会社 基板移載装置
GB2584069B (en) * 2019-03-27 2023-11-08 Millitec Food Systems Ltd Flow gripper

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525037A (en) * 1978-08-09 1980-02-22 Seiko Epson Corp Liquid form material injecting of display body
JPS5918435U (ja) * 1982-07-27 1984-02-04 日本電気ホームエレクトロニクス株式会社 非接触型ウエ−ハチヤツク

Also Published As

Publication number Publication date
JPS62211236A (ja) 1987-09-17

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